Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Sheng-Han Yi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sheng-Han Yi returned 3 record(s).

NumberTitle
1Sub-nanometer heating depth of atomic layer annealing
2Sub-7-nm textured ZrO2 with giant ferroelectricity
3AlN epitaxy on SiC by low-temperature atomic layer deposition via layer-by-layer, in situ atomic layer annealing