Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Florian Zörner Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Florian Zörner returned 1 record(s).

NumberTitle
1Plasma-assisted atomic layer deposition of germanium antimony tellurium compounds