Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Yong-Hwan Kwon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yong-Hwan Kwon returned 1 record(s).

NumberTitle
1Effect of Fluoride-based Plasma Treatment on the Performance of AlGaN/GaN MISHFET