Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Seok-Hee Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Seok-Hee Lee returned 1 record(s).

NumberTitle
1Temperature control for the gate workfunction engineering of TiC film by atomic layer deposition