Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Nicholas G. Kubala Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Nicholas G. Kubala returned 1 record(s).

NumberTitle
1Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4