Jae-Hwan Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jae-Hwan Kim returned 2 record(s).

Number	Title
1	Plasma-Enhanced Atomic Layer Deposition of Zirconium Oxide Thin Films and Its Application to Solid Oxide Fuel Cells
2	Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor