Inductively coupled plasma sources from Plasma ALD, LLC.


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Ki-Sik Im Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ki-Sik Im returned 1 record(s).

NumberTitle
1Capacitance-voltage characterization of Al2O3/GaN-on-insulator (GaNOI) structures with TMAH surface treatment