Sami Franssila Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sami Franssila returned 2 record(s).

Number	Title
1	Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support
2	Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma