Inductively coupled plasma sources from Plasma ALD, LLC.


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Jae Bon Koo Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jae Bon Koo returned 1 record(s).

NumberTitle
1Pentacene-Thin Film Transistors with ZrO2 Gate Dielectric Layers Deposited by Plasma-Enhanced Atomic Layer Deposition