Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

James Pattison Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by James Pattison returned 1 record(s).

NumberTitle
1Advanced thin conformal Al2O3 films for high aspect ratio mercury cadmium telluride sensors