Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Stefan Abel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Stefan Abel returned 1 record(s).

NumberTitle
1Back-End, CMOS-Compatible Ferroelectric Field-Effect Transistor for Synaptic Weights