Hyeong-Seon Yun Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Hyeong-Seon Yun returned 1 record(s).
| Number | Title |
|---|---|
| 1 | Fabrication and Properties of GaN MIS Capacitors with a Remote-Plasma Atomic-Layer-Deposited Al2O3 Gate Dielectric |