R. Engeln Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by R. Engeln returned 3 record(s).

Number	Title
1	In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al₂O₃
2	Innovative remote plasma source for atomic layer deposition for GaN devices
3	Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al₂O₃