Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

L. Witters Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by L. Witters returned 1 record(s).

NumberTitle
1Understanding and optimizing the floating body retention in FDSOI UTBOX