Inductively coupled plasma sources from Plasma ALD, LLC.


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Woo-Sung Jang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Woo-Sung Jang returned 1 record(s).

NumberTitle
1Characteristics of NiO films prepared by atomic layer deposition using bis(ethylcyclopentadienyl)-Ni and O2 plasma