Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Thomas Kups Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Thomas Kups returned 1 record(s).

NumberTitle
1Tuning the nanoscale morphology and optical properties of porous gold nanoparticles by surface passivation and annealing