Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Y.-M. Chi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Y.-M. Chi returned 1 record(s).

NumberTitle
1Carbon nanotube-supported Cu3N nanocrystals as a highly active catalyst for oxygen reduction reaction