Inductively coupled plasma sources from Plasma ALD, LLC.


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Marco Favaro Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marco Favaro returned 2 record(s).

NumberTitle
1Understanding the Oxygen Evolution Reaction Mechanism on CoOx using Operando Ambient-Pressure X-ray Photoelectron Spectroscopy
2A multifunctional biphasic water splitting catalyst tailored for integration with high-performance semiconductor photoanodes