Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Firas Sammoura Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Firas Sammoura returned 1 record(s).

NumberTitle
1ALD ruthenium oxide-carbon nanotube electrodes for supercapacitor applications