Robert A. Burke Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Robert A. Burke returned 2 record(s).

Number	Title
1	Plasma-Enhanced Atomic Layer Deposition of HfO2 on Monolayer, Bilayer, and Trilayer MoS2 for the Integration of High-κ Dielectrics in Two-Dimensional Devices
2	Flexible integrated circuits and multifunctional electronics based on single atomic layers of MoS2 and graphene