Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Nobuhiko Mitoma Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Nobuhiko Mitoma returned 1 record(s).

NumberTitle
1Influence of Al2O3 layer insertion on the electrical properties of Ga-In-Zn-O thin-film transistors