David J. Smith Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by David J. Smith returned 3 record(s).

Number	Title
1	Annealing Effects on the Band Alignment of ALD SiO₂ on (In_xGa_1-x)₂O₃for x = 0.25-0.74
2	Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
3	Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition