Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

J. Sumakeris Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J. Sumakeris returned 1 record(s).

NumberTitle
1Layer-by-layer epitaxial growth of GaN at low temperatures