Ingo Dirnstorfer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ingo Dirnstorfer returned 3 record(s).

Number	Title
1	On the Control of the Fixed Charge Densities in Al₂O₃ Based Silicon Surface Passivation Schemes
2	Trapped charge densities in Al₂O₃-based silicon surface passivation layers
3	Low-thermal budget flash light annealing for Al₂O₃ surface passivation