Tomas Palacios Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Tomas Palacios returned 2 record(s).

Number	Title
1	Ultrahigh purity plasma-enhanced atomic layer deposition and electrical properties of epitaxial scandium nitride
2	Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides