Jung-Hee Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jung-Hee Lee returned 4 record(s).

Number	Title
1	Effect of Fluoride-based Plasma Treatment on the Performance of AlGaN/GaN MISHFET
2	Fabrication and Characterization of an Extended-Gate AlGaN/GaN-Based Heterostructure Field-Effect Transistor-Type Biosensor for Detecting Immobilized Streptavidin-Biotin Protein Complexes
3	Interface Properties of Nickel-silicide Films Deposited by Using Plasma-assisted Atomic Layer Deposition
4	Capacitance-voltage characterization of Al₂O₃/GaN-on-insulator (GaNOI) structures with TMAH surface treatment