Inductively coupled plasma sources from Plasma ALD, LLC.


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Sang Woo Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sang Woo Kim returned 1 record(s).

NumberTitle
1High wet-etch resistance SiO2 films deposited by plasma-enhanced atomic layer deposition with 1,1,1-tris(dimethylamino)disilane