Daniel P. Vercauteren Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Daniel P. Vercauteren returned 2 record(s).

Number	Title
1	DFT modeling of plasma-assisted atomic layer deposition for Si(110) passivation: formation of boehmite-like chains as γ-Al₂O₃ precursors
2	Detailed Atomistic Modeling of Si(110) Passivation by Atomic Layer Deposition of Al₂O₃