Małgorzata Kot Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Małgorzata Kot returned 5 record(s).

Number	Title
1	Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources
2	In-gap states in titanium dioxide and oxynitride atomic layer deposited films
3	Long-term ambient surface oxidation of titanium oxynitride films prepared by plasma-enhanced atomic layer deposition: An XPS study
4	Localized defect states and charge trapping in atomic layer deposited-Al₂O₃ films
5	Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition