Takahiro Imai Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Takahiro Imai returned 3 record(s).

Number	Title
1	RT Atomic Layer Deposition of ZrO₂ By Using Plasma Excited Water Vapor
2	Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells
3	Room-temperature atomic layer deposition of ZrO₂ using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon