Päivi Mattila Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Päivi Mattila returned 4 record(s).

Number	Title
1	GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride
2	Comparison of ammonia plasma and AlN passivation by plasma-enhanced atomic layer deposition
3	High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning
4	Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces