Simone Brizzi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Simone Brizzi returned 3 record(s).

Number	Title
1	Analysis of nitrogen species in titanium oxynitride ALD films
2	Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides
3	Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition