Inductively coupled plasma sources from Plasma ALD, LLC.


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Shariq Siddiqui Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Shariq Siddiqui returned 2 record(s).

NumberTitle
1Nitride passivation of the interface between high-k dielectrics and SiGe
2Impact of oxygen plasma on nitrided and annealed atomic layer deposited SiO2/high-k/metal gate for high-voltage input and output fin-shaped field effect transistor devices