Inductively coupled plasma sources from Plasma ALD, LLC.


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Manpuneet K. Benipal Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Manpuneet K. Benipal returned 2 record(s).

NumberTitle
1Toward plasma enhanced atomic layer deposition of oxides on graphene: Understanding plasma effects
2Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms