Inductively coupled plasma sources from Plasma ALD, LLC.


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Miia Mäntymäki Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Miia Mäntymäki returned 1 record(s).

NumberTitle
1Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films