D Zielke Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by D Zielke returned 3 record(s).

Number	Title
1	Silicon surface passivation by ultrathin Al₂O₃ films and Al₂O₃/SiN_x stacks
2	Improved understanding of recombination at the Si/Al₂O₃ interface
3	Industrially relevant Al₂O₃ deposition techniques for the surface passivation of Si solar cells