Inductively coupled plasma sources from Plasma ALD, LLC.


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Sina Najmaei Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sina Najmaei returned 1 record(s).

NumberTitle
1Plasma-Enhanced Atomic Layer Deposition of HfO2 on Monolayer, Bilayer, and Trilayer MoS2 for the Integration of High-κ Dielectrics in Two-Dimensional Devices