Inductively coupled plasma sources from Plasma ALD, LLC.


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Heinz Frei Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Heinz Frei returned 2 record(s).

NumberTitle
1Detecting structural variances of Co3O4 catalysts by controlling beam-induced sample alterations in the vacuum of a transmission electron microscope
2Charge Transport through Organic Molecular Wires Embedded in Ultrathin Insulating Inorganic Layer