Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Ling-Wu Yang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ling-Wu Yang returned 1 record(s).

NumberTitle
1Properties of N-rich Silicon Nitride Film Deposited by Plasma-Enhanced Atomic Layer Deposition