Inductively coupled plasma sources from Plasma ALD, LLC.


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Nicolas Daix Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Nicolas Daix returned 1 record(s).

NumberTitle
1Tri-gate InGaAs-OI junctionless FETs with PE-ALD Al2O3 gate dielectric and H2/Ar anneal