Inductively coupled plasma sources from Plasma ALD, LLC.


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Ki-Bum Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ki-Bum Kim returned 3 record(s).

NumberTitle
1Formation of Ru nanocrystals by plasma enhanced atomic layer deposition for nonvolatile memory applications
2Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application
3A Bilayer Diffusion Barrier of ALD-Ru/ALD-TaCN for Direct Plating of Cu