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Ki-Su Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ki-Su Kim returned 3 record(s).

NumberTitle
1Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application
2Formation of Ru nanocrystals by plasma enhanced atomic layer deposition for nonvolatile memory applications
3A Bilayer Diffusion Barrier of ALD-Ru/ALD-TaCN for Direct Plating of Cu