Sergey S. Zarubin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sergey S. Zarubin returned 2 record(s).

Number	Title
1	Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control
2	Electron Transport Across Ultrathin Ferroelectric Hf0.5Zr0.5O2 Films on Si