Sergey S. Zarubin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sergey S. Zarubin returned 2 record(s).

Number	Title
1	Hydrogen radical enhanced atomic layer deposition of TaO_x: saturation studies and methods for oxygen deficiency control
2	Electron Transport Across Ultrathin Ferroelectric Hf_0.5Zr_0.5O₂ Films on Si