Saravana Balaji Basuvalingam Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Saravana Balaji Basuvalingam returned 3 record(s).

Number	Title
1	Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
2	Temporal and spatial atomic layer deposition of Al-doped zinc oxide as a passivating conductive contact for silicon solar cells
3	Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition