Inductively coupled plasma sources from Plasma ALD, LLC.


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Hiroyuki Ishii Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hiroyuki Ishii returned 1 record(s).

NumberTitle
1Enhancement of mobility in ultra-thin-body GeOI p-channel metal-oxide-semiconductor field effect transistors with Si-passivated back interfaces