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Paul Matthias Jordan Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Paul Matthias Jordan returned 3 record(s).

NumberTitle
1On the Control of the Fixed Charge Densities in Al2O3 Based Silicon Surface Passivation Schemes
2Low-thermal budget flash light annealing for Al2O3 surface passivation
3Trapped charge densities in Al2O3-based silicon surface passivation layers