Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Alexander Strobel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander Strobel returned 1 record(s).

NumberTitle
1Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films