Inductively coupled plasma sources from Plasma ALD, LLC.


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M. Kitano Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by M. Kitano returned 1 record(s).

NumberTitle
1Oxide Charge Engineering of Atomic Layer Deposited AlOxNy/Al2O3 Gate Dielectrics: A Path to Enhancement Mode GaN Devices