Inductively coupled plasma sources from Plasma ALD, LLC.


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Juhwan Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Juhwan Park returned 2 record(s).

NumberTitle
1A study on film thickness control of vertical flow showerhead reactor for RF plasma deposition
2Bottom-up plasma-enhanced atomic layer deposition of SiO2 by utilizing growth inhibition using NH3 plasma pre-treatment for seamless gap-fill process