Inductively coupled plasma sources from Plasma ALD, LLC.


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Ji-Zhou Kong Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ji-Zhou Kong returned 1 record(s).

NumberTitle
1Bipolar Resistive Switching Characteristics of HfO2/TiO2/HfO2 Trilayer-Structure RRAM Devices on Pt and TiN-Coated Substrates Fabricated by Atomic Layer Deposition